Building Three-dimensional Nanostructures via Membrane Folding

MEMS@MIT RESEARCH ABSTRACTS 2007 16 Figure 1: a) A 600-nm SiNx membrane folded to 900. b) Magnified view of folded region, which was thinned to 150 nm by CF4 RIE. The ion implantation was done at 16kV with a dose of 1018 ions/cm2. c) View of a 180o fold illustrating typical fold radius of about 1μm. p Figure 2: The layer-to-layer alignment error for 100μm ×100μm ×1 μm SiNx membranes that were folded and aligned using arrays of nanomagnets and an external magnetic field. p